What is the meaning of epitaxial?
What is the meaning of epitaxial?
Epitaxy refers to the deposition of an overlayer on a crystalline substrate, where the overlayer is in registry with the substrate. The overlayer is called an epitaxial film or epitaxial layer.
What are the types of epitaxial growth?
This chapter outlines the three major epitaxial growth processes used to produce layers of material for electronic, optical and optoelectronic applications. These are liquid-phase epitaxy (LPE), metalorganic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE).
What is epitaxial growth of thin film?
Epitaxy describes the oriented growth of a crystalline material on top of another. In a more specific term, it describes, predominately, the thin-film growth of a material on a substrate with a well-defined relationship.
What is epitaxial growth of silicon?
Silicon Epitaxial Growth Process. In wafer fabrication, silicon epitaxial deposition, or epitaxy, refers to the process of growing a thin layer of single-crystal silicon over a single-crystal silicon substrate.
How do you say epitaxial?
Phonetic spelling of epitaxial
- epi-tax-ial.
- epi-tax-i-al.
- ep-i-tak-sis.
- epi-taxial.
What is the use of epitaxial layer?
epitaxy. epitaxy, the process of growing a crystal of a particular orientation on top of another crystal, where the orientation is determined by the underlying crystal. The creation of various layers in semiconductor wafers, such as those used in integrated circuits, is a typical application for the process.
Why is epitaxial layer needed?
In a word, the epitaxial layer is easier to obtain a perfect and controllable crystal structure than the substrate, which is more conducive to the application and development of the material.
What is epitaxial layer in CMOS?
Epitaxy. Epitaxy growth consist of the formation of a layer of a single-crystal silicon on the surface of the silicon on the surface of the silicon material so that the crystal structure of the silicon is continuous across the interfaces.
What are the different epitaxial growth techniques used in semiconductor chip fabrication?
The , prominent among these techniques are Liquid Phase Epitaxy (LPE), Vapour Phase Epitaxy (VPE), Molecular Beam Epitaxy (MBE), Chemical Beam Epitaxy (CBE) and Atomic Layer Epitaxy (ALE) etc.
Why is epitaxial growth important in chip fabrication?
Grow a high-resistivity epitaxial layer on a substrate with extremely low resistance, and fabricate the device on the epitaxial layer, so that the high-resistivity epitaxial layer ensures a high breakdown voltage in the tube, while the low-resistance substrate reduces the resistance of the substrate, reducing the …